Singulation is a process in a semiconductor industry where high dense strips were singulated into single units. Jig saw singulation was the updated technology where strips were seated and vacuumed on a rubber nest jig during singulation. Jig saw singulation is also practical for high volume manufacturing as it demands minimal indirect materials. To cut the strips, jig alignment with the strip was measured by the machine to ensure that the rubber nest jig will not be cut and damaged while the strip is being singulated. However, with the different upstream process that the strip undergone, machine prompt frequent jig alignment errors when the machine detected that the strip saw street has high displacement with the recorded alignment of the saw street of rubber nest jig. Through this study, the authors have driven to understand the jig alignment errors occurrences as well as the assistance that can be made for the strip to be processed. The authors also included the study of the risks that might be imposed on both rubber nest jig and the affected strips, as well as the recommendations when jig alignment errors were encountered.

After singulation process where the strips are being cut into single units, unit tray loading comes next. Unit tray loading is the process where the singulated units will be picked up from the table and then place it in a tray pocket. Z-picker assembly executes the pick and placing activity through vacuum suction. Vacuum pads were installed on the Z-picker’s vacuum pad holder area, and it contacts with the unit. Vacuum pads come with different design depending on dimension and configuration of the device in process. Pick and place process is prone for unit dislodge as it transfers the unit from one place to another. These unit dislodges will result to missing units and will be accounted for yield loss. In this study, the authors were driven to understand the Z-picker mechanism together with the effect of vacuum pad designs, aiming to find the best match that would lessen the occurrence of unit dislodges.

Singulation machine frequently encounters Z-Picker errors and occasionally, worst case of unit scattering which leads on the gross unit rejection and scrappage. As analyzed, shifted units found on the chuck table module upon singulation of strip. Shifted units were induced on the last 3 cut lines when the units were dragged by the blade as the area held by chuck table vacuum suction gets smaller. These shifted units caused misalignment on the next singulation modules to the turn table module and Z-Picker module that resulted to vacuum loss. With the situation at hand, the authors have assessed the current design of the chuck table. The authors have found out that chuck table have shallow-grooved rubber jig pockets that flatten upon suction of units resulted to lesser area for vacuum application. As referenced to the formula F=PA, larger area multiplied by suction pressure results to better force to hold the units, thus redesigned chuck table with deep groove was introduced. The study also pertains to the analysis and validation on the application of deep-grooved rubber jig pockets of chuck table aiming to solve the unit shifting during sawing. Elimination of unit shifting was validated to be effective upon application of the deep-grooved chuck table. The study and validation of redesigned chuck table is essential to avoid unit scattering and unit missing.