29This study reports the rapid and effective nitrogen doping of ordered, mesoporous TiO 2 thin 30 films using nitrogen/argon (N 2 /Ar) plasma. The resulting nitrogen-doped TiO 2 (N-TiO 2 ) films 31 show a significant enhancement in both visible light absorption and photocatalytic activity. The 32 cubic ordered mesoporous TiO 2 thin films are prepared via a sol-gel method using titanium 33 tetrachloride (TiCl 4 ) as precursor and triblock copolymer Pluronic F127 as the template. 34 Following brief calcination, the TiO 2 films are treated with N 2 /Ar plasma under controlled 35 conditions of reactive gas pressure, microwave power, and plasma exposure duration. To vary 36 the degree of nitrogen doping, the plasma exposure time varied from zero up to 210 min. The 37 nitrogen content of the films increases with plasma exposure duration, up to over 3 at% N. X-ray 38 photoelectron spectroscopic (XPS) analyses and UV-vis absorbance spectra of N-TiO 2 films 39 indicate that the incorporated N atoms reduce the band gap of TiO 2 and thus enhance the 40 absorption of visible light. Finally, the visible-light photocatalytic activity of N-TiO 2 films is 41 determined from the photocatalytic degradation of methylene blue under visible-light 42 illumination (with a 455 nm LED). The N-TiO 2 films prepared by 150 min treatment show the 43 optimum photocatalytic activity with a pseudo-first order rate coefficient of 0.24 h -1 , which is six 44 times greater than that of undoped TiO 2 films. Treatment for excessive time (e.g. 210 min) leads 45 to a decline in photocatalytic activity due to coarsening of the porous structure. The present study 46 suggests that plasma-induced doping is a promising approach to enable the efficient 47 incorporation of heteroatoms into surfactant-templated TiO 2 thin films while maintaining their 48 nanostructures, thereby leading to the significant enhancement of visible-light photoactivity. 49 50 51 3 1. Introduction 52 Since Fujishima first reported H 2 generation by splitting water with a TiO 2 photocatalyst, 53 TiO 2 has attracted much attention due to many advantageous properties including its low cost, 54 high availability, chemical stability, and excellent optoelectronic properties [1-4]. These unique 55 properties have enabled titania to be utilized in a wide range of applications including solar 56 energy conversion, antimicrobial agents, whiteners in paint, ceramics, textiles, personal care 57 products, and catalysts for environmental remediation [4-12]. 58 Despite many attractive features of TiO 2 , one critical challenge is the innate inability of TiO 2 59 to absorb visible light [5]. The wide band gap of TiO 2 allows the absorption of solar light mainly 60 in the ultraviolet (UV) range, which corresponds to only 8% of the whole solar spectrum, while 61 visible light constitutes 47% [3]. To reduce the intrinsic band gap of TiO 2 , several strategies have 62 been tested including the incorporation of either metallic (e.g. Fe and Ni) or non-metallic (e.g. C, 63 F, N, S, P and B) atoms...