Photochemical machining is broadly employed in the fabrication of components which are used in various fields like electronics, medical, biological, etc. Copper is one of the materials having various applications. The accuracy of the photochemically machined component is governed by edge deviation and it plays vital role in many small size components. This paper focusses on the edge deviation analysis for photochemically machined copper specimens. The experimentation has been performed for different concentrations for ferric chloride etchant. The analysis of the specimens has been carried out and the suitable parameters are predicted in the paper.