Chemical vapor deposition (CVD) of boron from
BCl3 and H2 was investigated in a
dual-impinging
jet reactor which was connected to an FT-IR spectrometer for on-line
chemical analysis of the
reactor outlet stream. Formation of the intermediate,
BHCl2, during CVD of boron on a hot
tungsten substrate was experimentally verified. Boron deposition
started at substrate temperatures of around 750 °C and showed a significant deposition rate
increase with an increase in
temperature. At a surface temperature of 1350 °C, fractional
conversion of BCl3 to B and BHCl2
was found to be around 0.6 and 0.2, respectively. At temperatures
less than 1100 °C, fractional
conversion of BCl3 to BHCl2 was found to be
higher than the fractional conversion to boron.
Formation of BHCl2 occurs in the gas phase even at
temperatures lower than 750 °C.
Contribution of surface reactions to the formation of
BHCl2 increases with an increase in
temperature.
Thermal cracking of n-hexadecane was investigated in a
temperature range of 450−600 °C in
the presence of CO2. Effects of pressure and
temperature on product distribution were
experimentally determined under both subcritical and supercritical
conditions. At 1.2 MPa and
with a CO2 to n-C16 mole ratio of
25, C6−C14 olefins,
C10−C17 paraffins, and
C5−C10 fatty acids
were identified in the liquid product. Experiments conducted at
4.5 MPa (supercritical) yielded
higher selectivities for fatty acids and paraffins. The product
distribution of fatty acids and
olefins was found to be very sensitive to pressure and temperature.
It was also concluded that
heterogeneous carbon formation on the reactor surface was inhibited by
the supercritical phase.
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