Integrated optical sensors have become important in recent years since they are the only technology which allows the direct detection of biomolecular interactions. Moreover, silicon microelectronics technology allows mass production as well as the fabrication of nano-/macrosystems on the same platform by hybrid integration of sources, sensors, photodetectors and complementary metal-oxide semiconductor electronics.For the fabrication of an optical sensor nanodevice with an integrated Mach–Zehnder interferometric (MZI) configuration, the optical waveguides must have two main features: monomode behaviour and a high surface sensitivity. In this paper we present the development of a MZI sensor based on total internal reflection waveguides with nanometre dimensions. The aim is to use these sensors in environmental control to detect water pollutants by immunoassay techniques.

Compact poly(dimethylsiloxane)-based (PDMS) multiple internal reflection systems which comprise self-alignment systems, lenses, microfluidic channels and mirrors have been developed for highly sensitive absorbance measurements. With the proper definition of air mirrors at both sides of the sensing region, the optical path of the light from the LED has been meaningfully lengthened without a dramatic increase of the mean flow cell volume. By recursive positioning of such air mirrors, propagating multiple internal reflection (PMIR) systems have been designed, simulated and characterized. Experimental results confirm the ray-tracing predictions and allow the determining that there are some regions of the mean flow cell volume that do not contribute to the increase of the sensitivity. The tailoring of the sensing region, following the optical path, results in a similar limit of detection (110 nM) for fluorescein diluted in phosphate buffer. Finally, a ring configuration, labelled RMIR, has also been developed. With the addition of a third air mirror, the LOD can be decreased to 41 nM with the additional advantage of a substantial decrease of the length of the sensing region. These results confirm the validity of the proposed systems for high sensitivity measurements.

In this paper we report on an optical detection method that utilizes two physical effects for signal transduction, namely absorption and shift of refractive index. The device consists of a hollow prism and was fabricated by means of soft-lithography. It exhibits a high degree of monolithic integration. In order to keep down the amount of external equipment that is necessary to run the device, we were able to integrate several functions, such as focussing of light and alignment of optical fibres. Since all components are fabricated in the same material and in the same process, compatibility with other microfluidic devices or components can be achieved easily. The functional efficiency and the performance of the detector were tested by investigating solutions containing fluorescein, with concentrations between 5 and 1000 microM. The results clearly show the two regions in which the two physical effects are effective.