OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible.

This paper deals with investigation and fabrication of 4H-SiC MOSFETs with a high-k dielectric close to ZrSiO4. We are looking for the optimal stochiometry in order to obtain full benefits of its large bandgap, a k value higher than that of SiO2, thermodynamic stability on SiC, a good interface quality and process compatibility with SiC technology. Several Si/Zr ratios have been tested with the purpose of obtaining the most favorable dielectric configuration. The first test devices have been manufactured successfully with a stack gate dielectric consisting of a thin SiO2interlayer and a ZrxSiyOz(theoretical Si/Z=0.7) layer on top.