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SUMMARY Special techniques for examining the same specimen area of metal oxides with different instruments, for example light microscopy and scanning electron microscopy of identical features are described. Transmission electron microscopy and diffraction on stripped oxide films have been augmented by electron‐probe microanalysis both in a conventional microanalyser and in a combined electron‐microscope microanalyser EMMA‐4. Examples of scanning electron microscopy of oxidized sheet‐metal specimens and stripped films are given and probe analysis in the Stereoscan is illustrated. High‐voltage electron microscopy of oxide nodules reveals additional detail. Techniques for examining thick oxide scales are also described. The illustrations are taken from the oxidation of iron 10% chromium alloy at 500−600°C in air.