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A new fast and accurate capacitance determination methodology for interconnect capacitance extraction is presented. The methodology is based on Quasi Monte Carlo integration technique applied to method of moments solution of integral equation. As an example, the interconnects are modeled as parallel plate, cylindrical, and spherical capacitors separated by some distance and multilayered and multiconductor interconnects. The proposed capacitance determination methodology is more efficient and accurate than conventional methods and is also capable of dealing with singularity problem encountered in the kernel of the integrand. It is shown that the computed capacitances have excellent agreement with analytical formula based results within 2% error.

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