A new 2-DOF microelectromechanical systems (MEMS)-based parallel kinematic nanopositioner with electrostatic actuation is presented. The device has been designed, fabricated, and implemented using the silicon-on-insulator-based MEMSCAP SOIMUMPs process. Experimental characterization shows that in-plane displacements in excess of 15 µm are achievable and that the first resonant mode along each axis is located at approximately 820 Hz. The nanopositioner's use in a practical application is demonstrated, with the device being used as the scanning stage during an atomic force microscope scan.[ 2011-0372]Index Terms-Atomic force microscopy, electrostatic actuators, microelectromechanical systems (MEMS), nanopositioning.

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This paper presents the use of Class-E oscillators as inductive power transmitters for implanted telemetry devices that transmit information sensed by biosensors. Several Class-E oscillators are compared with an equivalent Class-E amplifier, showing higher efficiency while maintaining frequency clarity, stability and accuracy. Energy has been successfully transferred to a receiving inductor 1.5cm away, which has been rectified to produce a 1VDC signal.

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