Gold deposition on rotating disk electrodes, Bi 3+ adsorption on planar Au films and superconformal Au filling of trenches up to 45 μm deep are examined in Bi 3+ -containing Na 3 Au(SO 3 ) 2 electrolytes with pH between 9.5 and 11.5. Higher pH is found to increase the potential-dependent rate of Bi 3+ adsorption on planar Au surfaces, shortening the incubation period that precedes active Au deposition on planar surfaces and bottom-up filling in patterned features. Decreased contact angles between the Au seeded sidewalls and bottom-up growth front also suggest improved wetting. The bottom-up filling dynamic in trenches is, however, lost at pH 11.5. The impact of Au concentration, 80 mmol/L versus 160 mmol/L Na 3 Au(SO 3 ) 2 , on bottom-up filling is examined in trenches up to ≈ 210 μm deep with aspect ratio of depth/width ≈ 30. The microstructures of void-free, bottom-up filled trench arrays used as X-ray diffraction gratings are characterized by scanning electron microscopy (SEM) and Electron Backscatter Diffraction (EBSD), revealing marked spatial variation of the grain size and orientation within the filled features.

A possible path for fabricating three-dimensional metamaterials with curved geometries at optical and infrared frequencies is to stack flexible metamaterial layers. We have fabricated highly uniform metamaterials at terahertz frequencies on large-area, low-stress, free-standing 1 μm thick silicon nitride membranes. Their response remains comparable to that of similar structures on thick substrates as measured by the quality factor of the resonances. Transmission measurements with a Fourier transform infrared spectrometer highlight the advantage of fabricating high frequency metamaterials on thin membranes as etalon effects are eliminated. Releasing the membranes enables layering schemes and placement onto curved surfaces in order to create three-dimensional structures.

An electroformed, three-dimensional stylus Paul trap was designed to confine a single atomic ion for use as a sensor to probe the electric-field noise of proximate surfaces. The trap was microfabricated with the UV-LIGA technique to reduce the distance of the ion from the surface of interest. We detail the fabrication process used to produce a 150 μm tall stylus trap with feature sizes of 40 μm. We confined single, laser-cooled, (25)Mg(+) ions with lifetimes greater than 2 h above the stylus trap in an ultra-high-vacuum environment. After cooling a motional mode of the ion at 4 MHz close to its ground state ( = 0.34 ± 0.07), the heating rate of the trap was measured with Raman sideband spectroscopy to be 387 ± 15 quanta/s at an ion height of 62 μm above the stylus electrodes.

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