Thick polycrystalline Cd 1−x Zn x Te films with x ranged from 0.37 to 0.80 were obtained by the close spaced vacuum sublimation method. In order to investigate properties of the films structural, PIXE and Raman studies were carried out. Determination of chemical composition of the films by EDS, PIXE and XRD has shown good correlation of results. Raman spectroscopy reveals the relation between zinc concentration and vibrational properties of the films. Studies of the spatial distribution of the chemical elements on the film surface by micro-PIXE and micro-Raman spectroscopy have shown that films are uniform and free of secondary phases such as CdTe, ZnTe and Te inclusions.
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