The fluctuations in etch rates caused by changes in chamber conditions were studied. Excess deposition of C-F polymer on the chamber wall increased CF x density while H was consumed by the polymer and/or was deactivated on the conductive surface of Si electrodes. The change in radical densities had a clear relationship with the SiN etch rate. The etch rate was accurately predicted by statistical analysis using equipment engineering system (EES) data and optical emission spectroscopy (OES) signals which were extracted by considering both the physical model and the results of statistical analysis.

Polysilane/C 60-based solar cells were fabricated and investigated. Two-types of devices with bulk heterojunction and heterojunction structures were examined and characterized. Addition of silicon-based polymer to the organic solar cells improved the conversion efficiency by wide optical absorption and high carrier mobility. Microstructures of the solar cells were investigated by using X-ray diffraction and transmission electron microscopy. Energy levels in the present solar cells were discussed.

We perform an optimal-observable analysis of the final charged-lepton/b-quark momentum distributions in γγ → tt → X/bX for various beam polarizations in order to study possible anomalous ttγ, tbW and γγH couplings, which could be generated by SU(2) × U(1) gauge-invariant dimension-6 effective operators. We find optimal beam polarizations that will minimize the uncertainty in determination of those non-standard couplings. We also compare eē and γγ colliders from the viewpoint of the anomalous-topquark-coupling determination.

Polymer bulk hetero-junction solar cells were fabricated and the electronic and optical properties were investigated. C 60 and perylene were used as n-type semiconductors, and copper phthalocyanine, zinc phthalocyanine and pentacene were used as p-type semiconductors. Energy levels of the molecules were calculated, and HOMO levels were localized around the main chains of the zinc phthalocyanine and pentacene. Nanostructures of the solar cells were confirmed as mixed nanocrystals by transmission electron microscopy and electron diffraction.

Polysilane/C₆₀-based solar cells were fabricated and investigated. Two-types of devices with bulk heterojunction and heterojunction structures were examined and characterized. Addition of silicon-based polymer to the organic solar cells improved the conversion efficiency by wide optical absorption and high carrier mobility. Microstructures of the solar cells were investigated by using X-ray diffraction and transmission electron microscopy. Energy levels in the present solar cells were discussed