Tungsten oxide (WO 3 ) nanorods array prepared using chemical vapor deposition techniques was studied. The influence of oxygen gas concentration on the nanoscale tungsten oxide structure was observed; it was responsible for the stoichiometric and morphology variation from nanoscale particle to nanorods array. Experimental results also indicated that the deposition temperature was highly related to the morphology; the chemical structure, however, was stable. The evolution of the crystalline structure and surface morphology was analyzed by scanning electron microscopy, Raman spectra and X-ray diffraction approaches. The stoichiometric variation was indicated by energy dispersive X-ray spectroscopy and X-ray photoelectron spectroscopy.

Structural evolutions of tungsten oxide(WO3) samples on different substrates are studied using Raman spectroscopy, scanning electron microscopy, energy dispersive spectroscopy, x-ray diffraction and x-ray photoelectron spectroscopy. The WO3 samples are prepared using hot-filament CVD techniques. The focus of the study is on the evolutions of nano structures at different stages following deposition time. The experimental measurements reveal evolutions of the surface structures from uniform film to fractal-like structures, and eventually to nano particles, and crystalline structures from mono (0 1 0) crystalline thin film to polycrystalline thick film developments. The effect of high temperature on the nanostructured WO3 is also investigated. Well-aligned nanoscale WO3 rod arrays are obtained at a substrate temperature of up to 1400 °C. Further increasing the substrate temperature yields microscale crystalline WO3 particles.

We report the results of the ambient pressure synthesis of tungsten oxide nanowires and nanoparticles on AlN substrates using the hot filament CVD techniques. The morphologic surface, crystallographic structures, chemical compositions, and bond structures of the obtained samples have been investigated using scanning electron microscopy (SEM), X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDX), and Raman scattering, respectively. Different morphologies were observed for different substrate temperatures, but otherwise identical growth conditions. The experimental measurements reveal the evolutions of the crystalline states and bond structures following the substrate temperatures. Besides, different substrate materials also affected the tungsten oxide nanostructures. Bundles of wire-type tungsten oxide nanowires with a length of up to 5 mm were obtained on Al 2 O 3 substrate. Furthermore, the sensitive properties of the super long nanowires to the gas and different temperature were investigated. The dependence of the sensitivity of tungsten oxide nanowires to the methane as a function of the time was obtained. The sensitive properties of the tungsten oxide nanowires have almost linear relationship with the temperature.