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This paper presents the results of plasma synthesis of silicon nanostructures in an air-argon medium. The synthesis of silicon nanostructures was carried out in a vacuum chamber at a gas mixture pressure of 500 Torr, with partial pressures of argon and air in the ratio of 4:1. Molybdenum and silicon embedded in a copper tube were used as electrodes. Current and voltage were maintained in the range of 8-25 A and 30-50 V, corresponding. As a result of experiments, silicon nanostructures were deposited on the surface of the electrodes. Nanostructures were studied by optical and electron microscopes. Forms of silicon nanostructures were mainly in the form of nanotubes. Their diameters range from 200 nm to 500 nm, and their length reaches 1 mm. On the surface of these nanotubes, nanovilli with a diameter of about 5 nm and a length of 100 nm are observed.

This paper presents a method of synthesis of silicon nanowires in microarc argon plasma. During the experiment, an adjustable direct current source with a ballast resistor was used. The cathode was a molybdenum rod, and the anode was silicon. The silicon was located in a small deepening in a graphite rod. During the experiment, synthesis of silicon nanowires was observed on the surface of molybdenum rod. The obtained silicon nanowires are straight and non-hollow inside, nanowires have a smooth surface and have a hexagonal cross-section. The resulting nanowires will be able to find further application in light emitting diodes, lithium-ion batteries, supercapacitors, photovoltaics.

This paper proposes a method for creating silicon nanotubes in electric arc plasma, by evaporating the anode material and collection it on the cathode. During the experiments, various types of power sources were tested. Silicon nanotubes of complex configuration in the form of a straight stem with cylindrical branch and single-wall curved nanotubes were obtained. The obtained nanotubes will be able to find further application in light-emittingdiodes, lithium-ion batteries, and photovoltaics.