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The sensitivity for detecting hydrogen with multiple ZnO nanorods is found to be greatly enhanced by sputter-depositing clusters of Pd on the surface. The resulting structures show a change in room- temperature resistance upon exposure to hydrogen concentrations in N2 of 10–500ppm of approximately a factor of 5 larger than without Pd. Pd-coated ZnO nanorods detected hydrogen down to <10ppm, with relative responses of >2.6% at 10ppm and >4.2% at 500ppm H2 in N2 after a 10min exposure. There was no response at room temperature to O2. Approximately 95% of the initial ZnO conductance after exposure to hydrogen was recovered within 20s by exposing the nanorods to either air or pure O2. This rapid and easy recoverability make the Pd-coated nanorods suitable for practical applications in hydrogen-selective sensing at ppm levels at room temperature with <0.4mW power consumption.

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There is renewed emphasis on development of robust solid-state sensors capable of uncooled operation in harsh environments. The sensors should be capable of detecting chemical, gas, biological or radiation releases as well as sending signals to central monitoring locations. We discuss the advances in use of GaN-based solid-state sensors for these applications. AlGaN/GaN high electron mobility transistors (HEMTs) show a strong dependence of source/drain current on the piezoelectric polarization-induced two-dimensional electron gas (2DEG). Furthermore, spontaneous and piezoelectric polarization-induced surface and interface charges can be used to develop very sensitive but robust sensors to detect gases, polar liquids and mechanical pressure. AlGaN/GaN HEMT structures have been demonstrated to exhibit large changes in source–drain current upon exposing the gate region to various block co-polymer solutions. Pt-gated GaN Schottky diodes and Sc2O3/AlGaN/GaN metal-oxide semiconductor diodes also show large change in forward currents upon exposure to H2. Of particular interest is detection of ethylene (C2H4), which has strong double bonds and hence is difficult to dissociate at modest temperatures. Apart from combustion gas sensing, the AlGaN/GaN heterostructure devices can be used as sensitive detectors of pressure changes. In addition, large changes in source–drain current of the AlGaN/GaN HEMT sensors can be detected upon adsorption of biological species on the semiconductor surface. Finally, the nitrides provide an ideal platform for fabrication of surface acoustic wave (SAW) devices. The GaN-based devices thus appear promising for a wide range of chemical, biological, combustion gas, polar liquid, strain and high temperature pressure-sensing applications. In addition, the sensors are compatible with high bit-rate wireless communication systems that facilitate their use in remote arrays.

Single ZnO nanowire metal-oxide-semiconductor field-effect transistors (MOSFETs) were fabricated using nanowires grown by site selective molecular-beam epitaxy. When measured in the dark at 25°C, he depletion-mode transistors exhibit good saturation behavior, a threshold voltage of ∼−3V, and a maximum transconductance of order 0.3mS∕mm. Under ultraviolet (366nm) illumination, the drain–source current increase by approximately a factor of 5 and the maximum transconductance is ∼5mS∕mm. The channel mobility is estimated to be ∼3cm2∕Vs, which is comparable to that reported for thin film ZnO enhancement mode MOSFETs, and the on∕off ratio was ∼25 in the dark and ∼125 under UV illumination.