• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. Abstract-A novel parameter-dependent scheduled controller design is proposed for systems which exhibit switched dynamics. Switching is a result of varying sensor configurations available in the measurement system. The control architecture is based on a-priori designed local linear time-invariant (LTI) controllers, which are designed using frequency-domain loop-shaping techniques. Moreover, conditions on measured frequency response function (FRF) data of the plant are provided under which the closed-loop system is input-to-state stable (ISS) for arbitrarily fast parameter variations based on a generalized version of the circle criterion. By presenting a design and analysis framework for scheduled control systems that is easily implementable in existing control software, and does not require parametric plant models, this work connects well to the industrial control practice. The effectiveness of the proposed scheduling technique, as a way to improve both transient and steady-state performance, is demonstrated by means of a case study which includes measurement results obtained from an industrial wafer stage system.

Abstract-Detection and classification of nonlinearities in motion systems becomes of increasing importance with high demands on (closed loop) performance. In this paper two methods are compared that aim to measure both the linearized dynamics and the influence of nonlinearities. First, a broadband signal is used to measure a linear approximation of the systems dynamics. This method uses multisine signals with identical amplitude spectrum, but randomly distributed phases. Averaging over multiple periodic responses to the same signal and over multiple realizations of the random phase multisine allows the computation of the level of nonlinearities and external disturbances separately. This yields both a linear approximation of the systems dynamics and the amount of nonlinear 'disturbance' as a function of frequency. Second, single sine based measurements are used to measure the Higher Order Sinusoidal Input Describing Functions (HOSIDF) of the system under test. HOSIDFs describe the response of the system by describing not only the 'direct' response (gain and phase shift) of the system at the input frequency, but by describing the response at higher harmonics of the input frequency as well. This yields a quantitative measure of the power generated by nonlinearities at harmonics of the input frequency as a function of this frequency and the signal amplitude. In the paper these methods are utilized to acquire a non-parametric model for an industrial high precision stage. The effects of and sources for nonlinear influences are discussed for this particular case as well.