Recent high resolution mobile display revolution of OLEDs and flexible display surge demand of new displays metrology technologies. New generations of OLED displays with their high pixel densities require fast, reliable, non-destructive, whole substrate in-line defect review technology in sub-micro meter resolution inspection region. [1-3] For emerging flexible or even transparent displays, the transparent character makes the detectability challenges and stretches traditional optical inspection. When panel pixel size is smaller and the resolution is higher, automated optical Inspection (AOI) tools also encounter the performance limitation (optical light source wavelength is normally a few hundred nanometers, diffraction effects limit the smallest features can resolve when objective reaches light source wavelength) on detecting the critical defect in this small-pixel TFT array and facing a limited testing requirement.Before introduced Applied's EBR system, the traditional SEM analysis on displays requires to first use laser to mark the desired inspection locations, break the glass substrate into pieces, select the particular pieces to do metal coating to avoid charging effect, bring the coated samples to examine each piece separately under SEM. This is not only costly and time consuming but also makes it nearly impossible to inspect all the defects on the full panel. In addition to the tedious process, traditional lab SEM is noticeably affected by sample modification inflicted by high energy electron irradiation. Especially on various organic layers, SEM can make PR shrinkage, or hardening, which later difficult to remove by subsequent stripping process.Applied solves these limitations of turnaround time by providing inline SEM review at the industry's highest resolution and throughput without requiring the panel to be broken. The unique low e-beam technology is proven by customers that no impact on organic layers or TFT devices when energy lower than 1Kev, note the normally working condition ranges 400-1000 eV, while EBR can cover the whole energy regime of 200-20K eV. With 10 nm resolution, our EBR system is sufficient for display roadmap of VR/AR and highest resolution human being eyes can ever resolve.EBR system has its own load-lock with one additional parking slot can store one glass while measuring the other one, significantly save the sample loading time. The EBR stage automatically locates defects reported by other inspection tools or defined area-of-interest for process monitor. The EBR system covers entire glass or even multi-glass by precision stage movement. Two SEM column modules are used to reduce equipment footprint, each integrates an EDX making in-line failure analysis possible, Fig. 1. The acquisition rate of EBR system is <5sec per SEM image, <10sec per EDX point measurement, or 100 points/hour for automatic defect review (DR) and advanced process inspection (API) application. Figure 1. A schematic of EBR system.Figure 2. Different PRs inspected by EBR system. Results Organic Materials Inspecti...

Biodiesel has attracted considerable interest in recent years as an alternative, biodegradable and nonpolluting transportation fuel. Conventional alkaline process for biodiesel production are energy consuming and generate undesirable by-products such as soaps, that make difficult the separation and purification of biodiesel. Ionic liquids as environmentally benign chemical solvent, had been used in diverse chemical reactions. Especially, they could be applied in biodiesel production. Preparation of biodiesel catalyzed by ionic liquids have many merits, such as no corrosion to equipment, no pollution to environment, and reusability. Ionic liquids can improve the catalytic activity and they have wide utilization prospect in biodiesel preparation. In this paper, the advances in the Brønsted ionic liquids catalysts and their application in biodiesel production through transesterification of oils and fats were reviewed. In addition, the prospect for the application of the ionic liquids to catalyze biodiesel production was also stated. Since the cost of ionic liquid may be an issue, there are some challenges to be faced, such as the production of ionic liquids with low cost, easy recovery and with the possibility of reutilization of the catalyst for several cycles.

onic liquid is a green catalyzer and solvent which can be designed by changing the structure of its cation or anion. Ionic liquid has been used in diverse chemical reactions. Especially, Ionic liquids as environmentally friendly catalysts were applied in biodiesel production. Preparation of biodiesel catalyzed by ionic liquids have many merits, such as no corrosion to equipment, no pollution to environment, and reusability. In this paper, the advances in the base ionic liquids catalysts and their application in biodiesel production were reviewed. The characterization of the ionic liquids were summarized. In addition, the prospect for the application of the basic ionic liquids to catalyze biodiesel production was also stated. Since the cost of ionic liquid may be an issue, there are some challenges to be faced, such as the production of ionic liquids with low cost, easy recovery and with the possibility of reutilization of the catalyst for several cycles.

The display industry is experiencing an incredible period of technology transformation. The ongoing technology inflection from LCD to OLED delivers a dramatic performance improvement to end users. OLED enables beautiful and efficient displays, and curved form factors. We are already seeing the mass adoption of OLED in smart phones and the early adoption of OLED in TVs, and soon the next generation of flexible and bendable displays will emerge [1][2][3]. While LCDs dominates TV technology, acceleration of LCD TVs to even larger sizes drives the adoption of new G10.5/G11 fabs and higher resolutions (2K to 4K to 8K). On the other hand, emerging new µLED technologies show potential for applications such as wearables, AR/VR, automobiles, and large public displays. These display technology inflections require new and more complex processes and integration, new materials, and new form factors, thus require more intelligent and innovative yield management.To meet the surging demand for new display metrology technologies, Applied Materials launched an in-line E-beam review (EBR) system in 2016. The EBR product line offers a full range of generations from G2.5-G4.5, G6-G6/H, to G10.5/11, enabling precision yield control from AR/VR, µLEDs, OLEDs, and large LCDs and beyond. EBR brings decades-long e-beam innovation from Applied Materials' SEMVision systems (for the semiconductor industry) to the display industry. This unique low e-beam technology (with E<1KEV) has been proven by customers to create no physical or electrical damage to organic layers or TFT devices. It is the only e-beam system able to inspect nondestructively panels layer by layer and then allow the panel to go back to manufacturing through to the final product. Connecting the dots separates killer defects and non-killer defects; identifying yield loss root causes is essential for quickly ramping a new fab. Figure 1. A schematic of autonomous EBR system.Fig. 1 shows a picture of autonomous EBR system: fast, reliable, non-destructive, high resolution, whole substrate review systems. EBR has one or two SEM column modules depending on generation, capable of detection of both secondary electrons (SE) with resolution of 5-10 nm or back scattered electrons (BSE). Failure analysis can be performed by integrated EDX.Figure 2. Figure 2 shows same-panel images comparison of SE, BSE vs EDX. SE provides morphology information while BSE shows qualitative material contrast information; EDX gives quantitative elements Cr, Al, In, O, etc.A sample material interacts with incident electrons, their electrons become excited and the sample emits SE by atoms near the surface when having sufficient energy to escape the sample surface (E~ 0-50 eV). Thus SE is more surface sensitive, with greater resolution. BSE (E~E 0 ) has greater escape depth than that of SE, consequently resolution of topographical characteristics suffers. However, BSE is sensitive to the atomic mass of the nuclei, in turn, heavier elements appear brighter than lighter elements in a BSE image. EDX collects X rays...

onic liquid is a green catalyzer and solvent which can be designed by changing the structure of its cation or anion. Ionic liquid has been used in diverse chemical reactions. Especially, Ionic liquids as environmentally friendly catalysts were applied in biodiesel production. Preparation of biodiesel catalyzed by ionic liquids have many merits, such as no corrosion to equipment, no pollution to environment, and reusability. In this paper, the advances in the Lewis acid ionic liquids catalysts and their application in biodiesel production were reviewed. The characterization of the ionic liquids were summarized. The catalytic reaction mechanism of the Lewis acid ionic liquids in the biodiesel production was discussed. In addition, the prospect for the application of the Lewis acid ionic liquids to catalyze biodiesel production was also stated. Since the cost of ionic liquid may be an issue, there are some challenges to be faced, such as the production of ionic liquids with low cost, easy recovery and with the possibility of reutilization of the catalyst for several cycles.