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Acoustic damping of a capacitive micromachined ultrasonic transducer (CMUT) in air causes mechanical impedance to the membrane vibration, which significantly influences the transformation efficiency of the device. We observed the effect of acoustic damping on the transformation efficiency of a CMUT under various external acoustic pressure and device structure conditions; the results were compared with other factors such as capacitance variations originating from the change in air-hole rate [area ratio (AR)] over the total membrane area. The damping ratio of the perforated membrane plate was computed for each acoustic pressure condition, and the results were introduced into calculations of the membrane displacement using the finite element method to take the squeeze-film damping effect into account. The Q factor and transformation efficiency of the CMUT under various AR for the membrane and dimension conditions of the device were studied; the acoustic damping effect is discussed in terms of design optimization.

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Tbe Advanced Photon Source (APS), now under construction at Argonne National Laboratory, will have a control system employing graphicsworkstations at tbe operatorinterface level and VME-based microprocessors operating with a distributed database at the field level. Tbe alarm handler is an application utilizing X-Windows running on one or more operator interface workstations which monitors alarms generated by tbe VME-based microprocessors. Alarms can be grouped in a hierarchical manner. The operator can monitor, acknowledge, and mask alarms either individually or aggregately. Alarm changes of state and all operator modifications are logged. When alarms occur, display windows are automatically generated conveying system and subsystem relationships and severity. Menus are used to modify the alarm action configuration files and to obtain help. Since alarm groups are defined via an alarm configuration file, the alarm handler is a general purpose application wliich can be customized to monitor a single subsystem or configured to monitor the endue accelerator complex.