The fabricated micro machined ultrasonic transducers (pMUT) was based on piezoelectric laminated plates operating at flexural modes. The fabricated bimorph pMUT transducers were composed of 5-layers. A 4 μm thick lead zirconate titanate (PZT) thin film deposited by a sol-gel method was used. The piezoelectric layer exhibited a capacitance corresponding to a permitivity of e r =1,200. The electromechanical coupling coefficient (k 2 ) and quality factor (Q) were measured as k 2 =4.4% and Q=145 in air for a low frequency transducer (240 kHz). The effect of DC bias voltage on frequency and k 2 has been studied. The 16.9 MHz transducer yielded values of Q=25 in air and k 2 =3%.
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