Gallium nitride (GaN) high-electron-mobility transistor (HEMT) devices, which have wide application potential from power amplifiers to satellite, need to be thoroughly examined in terms of reliability in order to benefit the superior intrinsic properties of the device. The most critical parameter in the device reliability is the hotspot, or T max , which occurs somewhere on the subsurface and along the channel of the GaN HEMT, which is optically inaccessible due to optical path disability. Therefore, the T max value is underestimated in optical measurements, such as the thermographic IR and Raman methods. With 3-D electrothermal simulations, T max is obtained close to reality, but it requires a huge computation load and the complex modeling of semiconductor device physics. In 2-D or 3-D thermal simulations that do not use electrothermal simulations, since the self-heating is mostly modeled with a single heat source, neither the correct T max value is obtained nor the effect of bias conditions is considered. To address the aforementioned shortcomings, a hybrid method is demonstrated, which exploits the electrical measurements of GaN HEMT, which RF and reliability engineers often and easily do. It is demonstrated that T max can be determined quickly and close to the electrothermal simulations in a GaN HEMT Manuscript

This paper reports the influence of an ultrathin 1.5 nm atomic-layer-deposited HfO2 blanket layer as a gate dielectric on GaN high-electron-mobility transistors (HEMTs) grown on a 4H-SiC substrate. Transistors with a gate length of 250 nm and a source-to-drain distance of 3 μm were manufactured. The proposed technique involves HfO2 deposition at 250 ○ C prior to the gate metallization with no additional lithography steps. This approach reduced the drain lag by 83% compared to the conventional design with no gate dielectric. The HfO2 layer suppressed the parasitic lateral conduction from the gate, reduced surface trapping, and improved gate electrostatics. The manufactured devices exhibited nearly three orders of magnitude decreased surface leakage, better turn-on behavior, and improved cut-off frequency f T linearity by 16%. High quality metal-oxide interface formation was confirmed by the conductance method. Results demonstrate that the blanket HfO2 deposition is a promising approach to improve the current dispersion characteristics and gate electrostatics of GaN HEMTs without incurring major changes to the established fabrication techniques.