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High temperature superconducting (HTS) electron cyclotron resonance ion source called PKDELIS was designed, developed as a collaborative project mainly between Inter University Accelerator Centre (formerly Nuclear Science Centre) and Pantechnik. One of the major criteria of the design was to get a high performance source suitable for cryogen-free operation on a high voltage platform with minimum requirements of electrical power and cooling water. Ion beams having A/q of ~7 are required from this source for the high current injector of the superconducting linear accelerator. The HTS coils have been operational since 2003. A 80 mm gap, medium resolution, "third order" corrected analyzing magnet having a bending radius of 300 mm has been coupled close to the source. The analyzed beam is collected using a high power, water cooled Faraday cup. The design and performance of the source and issues related to the extraction and transport of the beam are discussed in detail

The electron cyclotron resonance (ECR) ion sources were originally developed for high energy physic applications. They are used as injectors on linear accelerators and cyclotrons to further increase the particle energy via high charge state ions. This ECR technology is well suited for sources placed on a high voltage platform where ac power available is limited by insulated transformers. The PANTECHNIK family of ion source with its wide range of ion beam (various charge states with various beam currents) offers new possibilities and perspectives in the field of ion implantation. In addition to all these possibilities, the PANTECHNIK ion sources have many other advantages like: a very long lifetime without maintenance expense, good stability, efficiency of ionization close to 100% (this improves the lifetime of the pumping system and other equipment), the possibility of producing ion beams with different energies, and a very good reproducibility. The main characteristics of sources like Nanogan or SuperNanogan will be recalled. We will especially present the results obtained with the new Microgan 10 GHz source that can be optimized for the production of high currents of monocharged ion, including reactive gas like BF3 (2 mA e of B+) or medium currents of low charge state like 0.5 mA e of Ar4+. The latest results obtained with Microgan 10 GHz show that it is possible to drive the source up to 30 mA e of total current, with an emittance of 150 π mm mrad at 40 kV and also to maintain the production of multicharged ions like Ar8+.

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