Study of an α-Al2O3 single crystal by electron-induced x-ray emission spectroscopy and cathodoluminescence is reported. The relative intensities of optical emissions due to F+ and F centers have been determined as a function of the parameters of the electron beam and the annealing of the sample. It is shown that the F+ centers, i.e., the oxygen vacancies with one trapped electron, are predominant when the density of the incident electron beam increases. Similar variation is observed when the electron energy varies from 1 to 4 keV. From the comparison between x-ray and optical spectra, the F+ centers are determined to be stable defects in the bulk of the sample.

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We describe an instrument designed for studying the electronic structure of bulk, surface, and deep solid–solid interface. The analysis is made by soft-x-ray emission spectroscopy induced by electron bombardment. The target is placed under ultrahigh vacuum and can be prepared and treated in situ. High resolution is achieved both as concerns the photon energy and the electron-beam energy. Tests have been made in the dispersive mode and in the characteristic isochromat mode. In both cases experimental resolution is in good agreement with the expected one.