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FLash Lamp Annealing -FLA Process Time ~ ms Process Time > 1 s  Only surface is heated  No cooling needed  Fast processing  Less total energy consumption (saves up to 80 %) Substrate  Complete substrate is heated  Cooling needed  Slow processing  Expensive and complex equipment for inline process Common Heating AnnealingFIGURE 1: Schema of temperature distribution in a solid sample for common thermal annealing (right) and flash lamp annealing (left).

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