The technology of surface acoustic wave (SAW) devices allows the integration of signal processing and sensor functions within one product. In the past, SAW sensors have been operated at room temperature or 100 to 200°C at most. Materials related problems become obvious if one attempts to increase this operating temperature to a value as high as 1000°C. First experimental results will be presented based on a variation of the metallization and the use of diffusion barriers. It is expected that the use of these specially taylored materials with particular functional properties will lead to a considerable improvement of the lifetime and reliability of SAW sensors and the development of devices resistant to high temperatures as well as high pressures and chemically aggressive environments. The high-temperature characteristics of such novel devices are investigated by finite element simulation and by experimental deformation analyses. It will also be discussed which assembly, interconnection, and packaging techniques are applicable at 1000°C.

The technology of surface acoustic wave (SAW) devices allows the integration of signal processing and sensor functions within one product. In the past, SAW sensors have been operated at room temperature or 100 C-200 C at most. Material-related problems become obvious if one attempts to increase this operating temperature to a value as high as 1000 C. First experimental results will be presented based on a variation of the metallization and the use of diffusion barriers. It is expected that the use of these specially tailored materials with particular functional properties will lead to a considerable improvement of the lifetime and reliability of SAW sensors and the development of devices resistant to high temperatures as well as high pressures and chemically aggressive environments. The high-temperature characteristics of such novel devices are investigated by finite-element simulation and by experimental deformation analysis. It will also be discussed which assembly, interconnection, and packaging techniques are applicable at 1000 C.

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Noch immer verstehen wir den Schmelzvorgang eines Festkörpers nur unzureichend. Die existierenden Modelle ergeben kein einheitliches Bild und sagen insbesondere wesentlich höhere Schmelzpunkte voraus, als man tatsächlich beobachtet. Tiefere Einsichten liefern jetzt metastabile nichtkristalline Materialien mit Strukturen ähnlich der einer Schmelze.