No abstract

No abstract

A new 105 GHz/500 kW/1 s electron cyclotron resonance heating (ECRH) system has been designed and being constructed on J-TEXT Tokamak. This system mainly consists of a microwave source, a transmission line, a launcher and other auxiliary units. Based on corrugated waveguides, the wave from the gyrotron can be efficiently transmitted with HE11 mode to the steerable quasi-optical launcher for injection. The transmission efficiency is about 85%, and the injection angle of the wave can be adjusted by the flat mirror of the launcher. Commissioning of this electron cyclotron heating system is scheduled to be done at 2019.

Different amount of porosity, which leads to the change in the dielectric constant of films from 4.1 to 2.9, can be created in amorphous SiC:H (a-SiC:H) films. The resultant CuSiN/a-SiC:H bilayered structure, as a copper capping barrier, shows improved thermal stability properties, lower leakage current density, and a low effective dielectric constant (keff) for the integrated ultralow-k a-SiOC:H film. This integrated film structure has the potential to meet the need of the 45 nm and lower technology node. Detailed characterizations of the integrated films were conducted to illustrate the possible mechanisms in the improvement of the film properties.