round water is among the Nation's most precious natural resources. Measurements of water levels in wells provide the most fundamental indicator of the status of this resource and are critical to meaningful evaluations of the quantity and quality of ground water and its interaction with surface water. Water-level measurements are made by many Federal, State, and local agencies. It is the intent of this report to highlight the importance of measurements of groundwater levels and to foster a more comprehensive and systematic approach to the long-term collection of these essential data. Through such mutual efforts, the Nation will be better positioned in coming decades to make wise use of its extensive groundwater resources.
A side-by-side comparison of the TiO2 deposition kinetics and the corresponding microstructures
was studied. The two precursors were titanium(IV) isopropoxide and anhydrous titanium(IV) nitrate, and all
depositions were conducted at low pressures (<10-4 Torr) in an ultrahigh vacuum chemical vapor deposition
reactor. For both precursors deposition kinetics were qualitatively similar and exhibited three distinct regimes
as a function of temperature. At the lowest temperatures, growth was limited by the rate of precursor reaction
on the substrate surface. At intermediate temperatures flux-limited growth was obtained, and at the highest
temperatures the growth rates decreased with increasing temperatures. The overall behavior was modeled
quantitatively for each precursor using a two-step mechanism involving reversible adsorption followed by
irreversible reaction. Titanium(IV) nitrate exhibited a lower activation energy of reaction (E
r = 98 kJ/mol)
which allowed deposition at lower temperatures compared to titanium(IV) isopropoxide (E
r = 135 kJ/mol).
The film microstructures were examined using transmission and scanning electron microscopy and X-ray
diffraction. Comparison of the microstructures of films deposited at similar temperatures revealed significant
differences in the reaction rate-limited regime. As the growth rates of the two precursors converged in the
flux-limited regime, the respective microstructures became indistinguishable. The importance of precursor
surface coverage and diffusion on this effect is described.
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