Using a molecular beam epitaxy system equipped with an inductively coupled radio frequency nitrogen plasma source, p-type GaN films were grown on sapphire substrates with no postgrowth treatment. Uniformity of the surface morphology and spatial homogeneity of the luminescence of the films were investigated using scanning electron microscopy and cathodoluminescence (CL) imaging, respectively. By examining the dependence of photoluminescence on the excitation laser power density at 6 and 300 K, three different emissions having different origins were identified. A blue emission at ∼3.25 eV is associated with shallow Mg impurities, while two different lower-energy emissions at ∼2.43 and ∼2.87 eV are associated with deep Mg complexes. The spatial distributions of the shallow and deep Mg impurities dominating the optical properties of the p-type GaN films were also examined along the growth direction by low- and room-temperature CL using an electron beam with a range of penetration depths