This work presents a novel three-intensity-measurement technique to determine the ellipsometric parameters ψ and in a polarizer-sample-analyser photometric ellipsometer. This technique can be employed to correct the azimuthal misalignment of the analyser with respect to the plane of incidence. By performing two sets of measurements with this technique with the polarizer's azimuth at +45 • and −45 • , respectively, we can simultaneously determine the azimuthal deviation of the polarizer and further improve the ellipsometric measurements. Applying this technique in the transmission mode allows us to obtain the phase retardation and the optical axis of a waveplate at the same time.

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