In this study, we report the sintering behavior and properties of a Ge 2 Sb 2 Te 5 alloy powders for use as a sputtering target by spark plasma sintering. The effect of various sintering parameters, such as pressure, temperature and time, on the density and hardness of the target has been investigated in detail. Structural characterization was performed by scanning electron microscopy and X-ray diffraction. Hardness and thermal properties were measured by differential scanning calorimetry and micro-vickers hardness tester. The density and hardness of the sintered Ge 2 Sb 2 Te 5 materials were 5.8976~6.3687 g/cm 3 and 32~75 Hv, respectively.
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