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This paper describes a way to fabricate novel hybrid low density nanostructures containing both carbon nanotubes (CNTs) and ceramic nanotubes. Using atomic layer deposition, a thin film of aluminum oxide was conformally deposited on aligned multiwall CNT foams in which the CNTs make porous, three-dimensional interconnected networks. A CO laser was used to etch pure alumina nanotube structures by burning out the underlying CNT substrate in discrete locations via the printed laser pattern. Structural and morphological transitions during the calcination process of aluminum oxide coated CNTs were investigated through in situ transmission electron microscopy and high-resolution scanning electron microscopy. Laser parameters were optimized to etch the CNT away (i.e. etching speed, power and focal length) while minimizing damage to the alumina nanotubes due to overheating. This study opens a new route for fabricating very low density three dimensionally patterned materials with areas of dissimilar materials and properties. To demonstrate the attributes of these structures, the etched areas were used toward anisotropic microfluidic liquid flow. The demonstration used the full thickness of the material to make complex pathways for the liquid flow in the structure. Through tuning of processing conditions, the alumina nanotube (etched) regions became hydrophilic while the bulk material remained hydrophobic and electrically conductive.

The use of porous micro-and nanostructured materials within microfluidic devices results in unique fluid transport characteristics. In this paper, we investigate the microfluidic behavior of hybrid alumina nanotube-based pathways within the hydrophobic carbon nanotube (CNT) barriers. These hybrid systems provide unique benefits for potential liquid transport control in porous structures with real-time sensing of fluids. In particular, we examine how the alignment of the alumina nanostructures with high internal porosity enables increased capillary action and sensitivity of detection. Based on the Lucas and Washburn model (LW) and the modified LW models, the microfluidic behavior of these systems is detailed. The time exponent prediction from the models for capillary transport in porous media is determined to be ≤0.5. The experimental results demonstrate that the average capillary rise in the nanostructured media driven by a capillary force follows t0.7. The hydrophilic/electrically insulating and hydrophobic/electrically conductive patterned structures of the device are used for electronic measurements within the microfluidic channels. The device structure enables the detection of fluid samples of very low analyte concentrations (1 μM) that can be achieved due to the very high surface area of the hybrid structure combined with the electrical conductivity of the CNT support structure.