In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.

In this paper, we present a vibration energy harvester using magnetoelectric laminate composite and a springless spherical permanent magnet as a proof mass. The harvester utilizes a freely movable spherical permanent magnet to transform external vibration into a time varying magnetic field applied to the magnetoelectric transducer. The laminate composite consists of a Ni–Mn–Ga-based MSMA (magnetic shape memory alloy) element and a PZT (lead zirconate titanate) plate. A proof-of-concept harvester has been fabricated and characterized at various input accelerations and frequencies. A maximum open circuit voltage of 1.18 V has been obtained in response to a 3g vibration at 17 Hz with the fabricated device. Moreover, a maximum output voltage of 10.24 V and output power of 4.1 μW have been achieved on a 950 Ω load, when the fabricated energy harvester was mounted on a smartphone and shaken by hand.

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We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively.

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