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We have investigated hydrogen plasma induced by intense extreme ultraviolet (EUV) radiation by measuring the plasma parameters and population density of radicals, which is expected to clean the tin contamination on the optics in EUV sources, using a time-resolved optical emission spectroscopy. The obtained electron density was ne=(2±0.4)×1013cm−3, and the electron temperature was Te=1±0.2eV. The electron density was five orders of magnitude higher than that of previous study. The radical population density determined by the experiment was consistent with that calculated with a collisional radiative model, showing excitation and recombination are dominant production processes.

The Zeeman splitting effect is observed in a strong magnetic field generated by a laser-driven coil. The expanding plasma from the coil wire surface is concentrated at the coil center and interacts with the simultaneously generated magnetic field. The Cu I spectral lines at wavelengths of 510.5541, 515.3235, and 521.8202 nm are detected and analyzed. The splittings of spectral lines are used to estimate the magnetic field strength at the coil center as ∼31.4 ± 15.7 T at a laser intensity of ∼5.6 × 1015 W/cm2, which agrees well with measurements using a B-dot probe. Some other plasma parameters of the central plasma disk are also studied. The temperature is evaluated from the Cu I spectral line intensity ratio, while the electron density is estimated from the Stark broadening effect.

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