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In high precision three coordinates measuring machine in the process of measurement, dynamic error analysis has been improved measuring machine precision and speed is an important subject. Three coordinate measuring machine structure in the movement of the dynamic deformation of the theoretical points. Due to the servo motor driving force and moving inertia force components will lead to the overall bridge, carriage, upright post and a Z shaft and other components deflect. And through the corresponding theoretical calculation, it is pointed out that the bending deformation of the main structure of the air bearing guide of the components is one of the main causes of the dynamic error. By doing dynamic error experiments, the dynamic errors of CMM body deformation was measured to verify the impact of the body deformation and probe position accuracy, optimize the design of error correction and institutions provide the basis.