We report detailed fabrication and characterization of poly-Si thin-film transistors (TFTs) with T-shaped gate (T-gate) and lightly-doped drain (LDD) structures. The formation of the LDD underneath the wings of a T-gate primarily relies on the shadowing of implanted dopants during the implantation of source and drain. Therefore, the fabrication of LDD structures in our proposed T-gate poly-Si TFTs can save a number of process steps as compared to conventional poly-Si TFTs with LDD structures. Our fabricated T-gated poly-Si TFTs with LDD structures not only exhibit suppressed off-state leakage current but also show a significant improvement in on-state current as compared to that of conventional poly-Si TFTs with the same top-gate dimension.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.