Dissolution characteristics, such as the solubility of copper oxides and the complexation stability between copper ions and aqueous solutions, were analyzed under various pH values of citric acid or monoethanolamine (MEA) aqueous solution, which are known as complexing agents for copper. The dissolution characteristics of the aqueous solutions were measured in terms of the solubility of copper oxides and metallic copper. The citric acid solution had a good solvent property for copper oxides in the range of acidic conditions, whereas the MEA solution showed the same property in the basic region. The surface roughness of copper film treated with solutions having different pH values strongly depended on the solubility of copper oxides. The treatment of citric acid and MEA of different pH values has an influence on the oxidation status of copper surface, which is confirmed with X-ray photoemission spectroscopy and electrochemical impedance.

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