The pyroelectric coefficients and pyroelectric response in lead zirconate titanate (Pb(ZrxTi1−x)O3), lead titanate (PbTiO3), and zinc oxide (ZnO) thin films (0.1–2.0-μm thick) have been studied for possible integrated thermosensor applications. Pyroelectric properties of these films deposited on thick (500-μm) silicon substrates and thin (1.0-μm) polysilicon membranes have been investigated. The measured pyroelectric coefficients for these materials are 70, 95, and 1.0 nC/cm2 K for Pb(Zr0.54Ti0.46)O3, PbTiO3, and ZnO, respectively. Coupling effects between the pyroelectric film and substrate were studied. It was observed that the primary pyroelectric effect dominates the pyroelectric response in Pb(Zr0.54Ti0.46)O3 and PbTiO3 thin films while the secondary effect is dominant in ZnO thin films.

Lead titanate (PbTiO3) thin-film pyroelectric infrared detectors have been fabricated on polycrystalline silicon micromechanical membranes. Pyroelectric PbTiO3 thin films of thickness ranging from 0.2 to 0.6 μm were prepared by sol-gel spin casting techniques and deposited on 1.0-μm-thick polycrystalline silicon membranes suspended 1.0 μm above the surface of a silicon wafer. This composite structure offers high sensitivity and low thermal mass. The measured pyroelectric coefficient for 0.36-μm-thick PbTiO3 films is 90 nC/cm2 K. The measured blackbody voltage responsivity for a pyroelectric element with an active area of 7×10−4 cm2 at 297 K and a chopping frequency of 50 Hz is 4.2×104 V/W. The measured normalized detectivity D* at 297 K and 50 Hz is 1.0×109 cm Hz1/2/W.

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