It is advantageous to construct a dielectric metasurface in silicon due to its compatibility with cost-effective, mature processes for complementary metal-oxide-semiconductor devices. However, high-quality crystalline-silicon films are difficult to grow on foreign substrates. In this work, we propose and realize highly efficient structural color filters based on a dielectric metasurface exploiting hydrogenated amorphous silicon (a-Si:H), known to be lossy in the visible regime. The metasurface is comprised of an array of a-Si:H nanodisks embedded in a polymer, providing a homogeneously planarized surface that is crucial for practical applications. The a-Si:H nanodisk element is deemed to individually support an electric dipole (ED) and magnetic dipole (MD) resonance via Mie scattering, thereby leading to wavelength-dependent filtering characteristics. The ED and MD can be precisely identified by observing the resonant field profiles with the assistance of finite-difference time-domain simulations. The completed color filters provide a high transmission of around 90% in the off-resonance band longer than their resonant wavelengths, exhibiting vivid subtractive colors. A wide range of colors can be facilitated by tuning the resonance by adjusting the structural parameters like the period and diameter of the a-Si:H nanodisk. The proposed devices will be actively utilized to implement color displays, imaging devices, and photorealistic color printing.
We present a highly efficient omnidirectional color filter that takes advantage of an Ag-TiO2-Ag nano-resonator integrated with a phase-compensating TiO2 overlay. The dielectric overlay substantially improves the angular sensitivity by appropriately compensating for the phase pertaining to the structure and suppresses unwanted optical reflection so as to elevate the transmission efficiency. The filter is thoroughly designed, and it is analyzed in terms of its reflection, optical admittance, and phase shift, thereby highlighting the origin of the omnidirectional resonance leading to angle-invariant characteristics. The polarization dependence of the filter is explored, specifically with respect to the incident angle, by performing experiments as well as by providing the relevant theoretical explanation. We could succeed in demonstrating the omnidirectional resonance for the incident angles ranging to up to 70°, over which the center wavelength is shifted by below 3.5% and the peak transmission efficiency is slightly degraded from 69%. The proposed filters incorporate a simple multi-layered structure and are expected to be utilized as tri-color pixels for applications that include image sensors and display devices. These devices are expected to allow good scalability, not requiring complex lithographic processes.
Trans-reflective color filters, which take advantage of a phase compensated etalon (silver-titania-silver-titania) based nano-resonator, have been demonstrated to feature a variable spectral bandwidth at a constant resonant wavelength. Such adjustment of the bandwidth is presumed to translate into flexible control of the color saturation for the transmissive and reflective output colors produced by the filters. The thickness of the metallic mirror is primarily altered to tailor the bandwidth, which however entails a phase shift associated with the etalon. As a result, the resonant wavelength is inevitably displaced. In order to mitigate this issue, we attempted to compensate for the induced phase shift by introducing a dielectric functional layer on top of the etalon. The phase compensation mediated by the functional layer was meticulously investigated in terms of the thickness of the metallic mirror, from the perspective of the resonance condition. The proposed color filters were capable of providing additive colors of blue, green, and red for the transmission mode while exhibiting subtractive colors of yellow, magenta, and cyan for the reflection mode. The corresponding color saturation was estimated to be efficiently adjusted both in transmission and reflection.
The enhancement of color saturation and color gamut has been demonstrated, by taking advantage of a dual-band color filter based on a subwavelength rectangular metal-dielectric resonant grating, which exhibits an adjustable spectral response with respect to its relative transmittances at the two bands of green and red, thereby producing any color in between green and red, through the adjustment of incoming light polarization. Also, the prominent features of the spectral response of the filter, namely the bandwidth and resonant wavelength, can be readily adjusted by varying the dielectric layer thickness and the grating pitch, respectively. The dependence of chromaticity coordinates of the filter in the CIE (International Commission on Illumination) 1931 chromaticity diagram upon the parameters of the spectral response, including the center wavelength, spectral bandwidth and sideband level, has been rigorously examined, and their influence on the color gamut and the excitation purity, which is a colorimetric measure of saturation, has been analytically explored at the same time, in order to optimize the color performance of the filters. In particular, a device with wider spectral bandwidth was observed to efficiently extend the color gamut and enhance the color saturation, i.e. the excitation purity for a given sideband level. Two dual-band green-red filters, exhibiting different bandwidths of about 17 and 36 nm, were specifically designed and fabricated. As compared with the case with narrower bandwidth, the device with wider bandwidth was observed to provide both higher excitation purity leading to better color saturation and greater separation of the chromaticity coordinates for the filter output for different incident polarizations, which provides extended color gamut. The proposed device structure may permit the color tuning span to encompass all primary color bands, by adjusting the grating pitch.
We have demonstrated a highly efficient electrically tunable color filter, which provides precise control of color output, taking advantage of a nano-photonic polarization-tailored dichroic resonator combined with a liquid-crystal based polarization rotator. The visible dichroic resonator based on the guided mode resonance, which incorporates a planar dielectric waveguide in Si3N4 integrated with an asymmetric two-dimensional subwavelength Al grating with unequal pitches along its principal axes, exhibited polarization specific transmission featuring high efficiency up to 75%. The proposed tunable color filters were constructed by combining three types of dichroic resonators, each of which deals with a mixture of two primary colors (i.e. blue/green, blue/red, and green/red) with a polarization rotator exploiting a twisted nematic liquid crystal cell. The output colors could be dynamically and seamlessly customized across the blend of the two corresponding primary colors, by altering the polarization via the voltage applied to the polarization rotator. For the blue/red filter, the center wavelength was particularly adjusted from 460 to 610 nm with an applied voltage variation of 2 V, leading to a tuning range of up to 150 nm. And the spectral tuning was readily confirmed via color mapping. The proposed devices may permit the tuning span to be readily extended by tailoring the grating pitches.
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