Articles you may be interested inHigh-order optical harmonic generation as a process of single atom interaction with sub-relativistic single-and multicolor laser fields AIP Conf.A bright metastable helium ͑He ‫ء‬ ͒ beam is collimated sequentially with the bichromatic force and three optical molasses velocity compression stages. Each He ‫ء‬ atom in the beam has 20 eV of internal energy that can destroy a molecular resist assembled on a gold coated silicon wafer. Patterns in the resist are imprinted onto the gold layer with a standard selective etch. Patterning of the wafer with the He ‫ء‬ was demonstrated with two methods. First, a mesh was used to protect parts of the wafer making an array of grid lines. Second, a standing wave of = 1083 nm light was used to channel and focus the He ‫ء‬ atoms into lines separated by / 2. The patterns were measured with an atomic force microscope establishing an edge resolution of 80 nm. Our results are reliable and repeatable.

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