Abstract. The aim of this paper is to present a practical and accurate program of correction based on a new mathematical description of q~(pz), which allows a global correction combining atomic number and absorption correction [ZA]. Key words: EPMA, computer program, correction procedure, X-ray depth distribution.Electron probe microanalysis (EPMA) requires several corrections to quantify a specimen. These corrections allow to convert the measured intensity of the characteristic X-ray into elemental concentration. The measured intensity I~ emitted from element A in a homogeneous sample is expressed (in the absence of significant fluorescence effects) by: I~ = cst " C A J o tb e(PZ) " exp(--ZePZ) dpz ,where Ca is the weight fraction of element A, pz is the mass depth in the sample,

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Results from measurements of K-shell ionization cross sections of the elements Cr, Ni and Cu by electron impact with energies in the range 6.5-40 keV are presented. Cross sections were obtained by measuring characteristic x-rays emitted from (1-6 nm thick) films of the studied elements deposited on self-supporting carbon backing films. The procedure yields relative cross sections with uncertainties of the order of 2%. Transformation to absolute units increases the uncertainties to about 10%. Our results are compared with those from other groups and with two calculations based on the first Born approximation, which include corrections for exchange, Coulomb and relativistic effects. A simple empirical formula that accurately describes the energy dependence of the measured cross sections is provided.