Predicting unscheduled breakdowns of plasma etching equipment can reduce maintenance costs and production losses in the semiconductor industry. However, plasma etching is a complex procedure and it is hard to capture all relevant equipment properties and behaviors in a single physical model. Machine learning offers an alternative for predicting upcoming machine failures based on relevant data points. In this paper, we describe three different machine learning tasks that can be used for that purpose: (i) predicting Time-To-Failure (TTF), (ii) predicting health state, and (iii) predicting TTF intervals of an equipment. Our results show that trained machine learning models can outperform benchmarks resembling human judgments in all three tasks. This suggest that machine learning offers a viable alternative to currently deployed plasma etching equipment maintenance strategies and decision making processes.

An increasing number of industrial assets are equipped with IoT sensor platforms and the industry now expects data-driven maintenance strategies with minimal deployment costs. However, gathering labeled training data for supervised tasks such as anomaly detection is costly and often difficult to implement in operational environments. Therefore, this work aims to design and implement a solution that reduces the required amount of data for training anomaly classification models on time series sensor data and thereby brings down the overall deployment effort of IoT anomaly detection sensors. We set up several in-lab experiments using three peristaltic pumps and investigated approaches for transferring trained anomaly detection models across assets of the same type. Our experiments achieved promising effectiveness and provide initial evidence that transfer learning could be a suitable strategy for using pretrained anomaly classification models across industrial assets of the same type with minimal prior labeling and training effort. This work could serve as a starting point for more general, pretrained sensor data embeddings, applicable to a wide range of assets.

<div>Abstract—An increasing number of industrial assets are equipped with IoT sensor platforms and the industry now expects data-driven maintenance strategies with minimal deployment costs. However, gathering labeled training data for supervised tasks such as anomaly detection is costly and often difficult to implement in operational environments. Therefore, this work aims to design and implement a solution that reduces the required amount of data for training anomaly classification models on time series sensor data and thereby brings down the overall deployment effort of IoT anomaly detection sensors. We set up several in-lab experiments using three peristaltic pumps and investigated approaches for transferring trained anomaly detection models across assets of the same type. Our experiments achieved promising effectiveness and provide initial evidence that transfer learning could be a suitable strategy for using pretrained anomaly classification models across industrial assets of the same type with minimal prior labeling and training effort. This work could serve as a starting point for more general, pretrained sensor data embeddings, applicable to a wide range of assets.</div>

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