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The main purpose of this paper was to analyze how the doping content of Ga2O3 effect the Gallium doped zinc oxide (GZO) targets. GZO targets were prepared by air sintering. The density, sheet resistance, bending strength and Vickers hardness were measured. The morphologies and microstructures were characterized by XRD and SEM. The results showed that GZO target with Ga2O3 content of 1wt% showed the best properties which corresponded to the highest relative density and bending strength of 99.2 % and 91.79MPa respectively, and the lowest sheet resistance of 7.36Ω/. While the Ga2O3 content was higher (2 wt% or 3 wt %), the second phase came out.

The ultrahigh density Gallium (Ga2O3 1 wt%) doped zinc oxide (ZnO, 99wt%) targets were prepared by air sintering. The relative density, conductivity, bending strength, Vickers hardness and shrinkage ratio of GZO targets were measured. The morphologies and microstructures were characterized by XRD and SEM. It turns out that sintered GZO targets achieved a relative density of 98%, square resistance of 7Ω/□, Vickers hardness of 310HV and a bending strength of 90.79MPa. The best sintering temperature is 1300°C. The Ga2O3 added can effectively enter into the ZnO lattice structure to form solid solution during sintering. The second phase of GaZn2O4 turned out when the sintering temperature was 1350°C.

This paper deals with the preparation of zinc oxide doped tungsten oxide target by sintering in oxygenated flow atmosphere. The effect of the composition and the sintering conditions on the properties and microstructures of the targets has been studied. The optimal sintering conditions were found. The sintered zinc doped tungsten oxide ceramic target can achieve a relative density of 99.58%, a bending strength of 31.79MPa and a Vickers hardness of 349MPa.

The Titanium-doped tungsten trioxide (Ti/WO3) targets with high density was prepared by sintering in oxygen atmosphere. The density, bending strength and Vickers hardness were measured. The morphologies and microstructures were characterized by XRD and SEM. The Ti/WO3 targets were used to prepare the film by magnetron sputtering .The film was characterized by Ultraviolet spectrophotometer. The results showed that 1040°C was the best sintering temperature for making Ti/WO3 ceramic targets. The relative density of the target was up to 92.18%. The visible light transmittance of the Ti/WO3 thin films reduced quickly along with the reduction of wavelength. Two absorb peaks at the wavelength of 384 nm and 480 nm were found, which would play an important role in making electro-chromic materials.