BIOFET is a device which changes the electrostatic potential due to binding of an analyte. Nanotechnology plays a vital role in Biosensor field-effect transistor (BIOFET) by incorporating the Nanowire in the structure. The aim of the project is to improve the sensitivity of a BIOFET by varying the oxide thickness, nanowire length and radius. The sensitivity and Debye length was calculated. The obtained results were analysed and compared by using the SPSS tool.