We present an experimental equipment for studying the charge carrier distribution in the
interior of bipolar 4H-SiC high power devices by means of laser absorption measurements. Since the
light absorption coefficient in a semiconductor depends on the electron and hole concentration, the
attenuation of a laser beam transmitted through a sample is an integral function of the local charge
carrier density. In order to detect the tiny changes in the light intensity caused by the plasma-optical
effect, a highly sensitive measurement set-up has been developed. Its crucial components are a
low-noise blue laser and a high-speed and broad-band photo-diode amplifier circuit. Sample
preparation is sophisticated and requires special care. We investigated charge carrier profiles in
4H-SiC pin-diodes in the high-injection regime at current densities between 175 A/cm² and 350
A/cm². The measured charge carrier profiles are in good agreement with computer simulations.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.