Plasma destruction of toxins, and volatile organic compounds in particular, from gas streams is receiving increased attention as an energy efficient means to remediate those compounds. In this regard, remediation of trichloroethylene (TCE) in silent discharge plasmas has been experimentally and theoretically investigated. We found that TCE can be removed from Ar/OZ gas streams at atmospheric pressure with an energy efficiency of 15-20 ppm/(mJ/cm3), or 2-3 kW h kg-'. The majority of the Cl from TCE is converted to HCl, Cl,, and COCl*, which can be removed from the gas stream by a water bubbler. The destruction efficiency of TCE is smaller in humid mixtures compared to dry mixtures due to interception of reactive intermediates by OH radicals.