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This paper presents a new modelling method for MEMS components based on Cosserat theory. By constructing Cosserat elements, generating symbolic code and development of numeric code in VHDL-AMs for selected demonstrators, we are able to effectively simulate and predict their linear and nonlinear behavior in estimating system performance and guiding the reliability verification process. The simplicity of the Cosserat approach follows from the possibility to formulate interconnected slender components in terms of a network of quasi-rigid bodies (Cosserat elements). This modularization fits well into the behavioral modelling where a relatively low degree of freedom is needed to capture salient features of system. Furthermore, the manner in which Cosserat elements and their interactions are formulated makes this method ideally suited for nonlinear dynamic simulations in the presence of large deflections. (9) a,h = a,m + &T x n 132 2003 Design, Test, Integration 8 Packaging of MEMSIMOEMS