Cu-Al-N thin films were deposited by means of the unbalanced magnetron cosputtering technique, varying the pulsed DC source power that is associated with the aluminum target. The structural characterization, done through x ray difraction (XRD) and transmition electronic microscopy (TEM), showed that the films were nanocrystalline, with a crystallite size of an order of magnitude of 10 nm. According to the chemical composition results, they consisted of a Cu-Al phase, copper nitride and aluminum nitride, that depended on the deposition power. The electrochemical characterization was performed by means of Tafel extrapolation and electrochemical impedance spectroscopy (EIS). The Tafel results showed a decrease in the corrosion current with an increase in the power, and the electrochemical impedance results showed an inductive behavior at low frequencies.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.