A mechanical wedge polishing procedure that offers a simple, cost-effective and rapid way to look into the depth of a thin film with different surface-sensitive scanning techniques has been developed. As an example of its wide applicability, this method was utilized for the investigation of two differently prepared superconducting YBa 2 Cu 3 O 7−δ thin films: an Hf-doped film prepared by chemical solution deposition and an undoped film grown by pulsed laser deposition. Upon polishing, the roughness of the samples was reduced to less than 5 nm (peak-to-valley) without influencing the superconducting properties of the films. Thus, nanoscale polishing opens up a unique possibility for microscopic studies with various surface-sensitive techniques. We demonstrate the successful imaging of flux lines by low temperature magnetic force microscopy after polishing a formerly rough as-prepared film. By applying the wedge polishing procedure to the Hf-doped sample, high resolution electron backscattering diffraction investigations reveal the homogeneous distribution of non-superconducting BaHfO 3 nanoparticles in the whole volume of the film.

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