No abstract

An apparatus for the quantitative analysis of gas impurities by means of a quadrupole mass spectrometer is described. The goal-to be able to measure and record component concentrations down to 0.1 PPM-requires some special construction techniques and operating conditions in order to be realised. The special calibration and analysis procedures necessary for the quantitative measurement of small concentrations of gas components within a carrier gas are described. The usefulness of both the apparatus presented and the evaluation method is demonstrated by means of specific examples.