Ammonothermal GaN samples with the concentration of free electrons of 1018 and 1019 cm−3 were annealed in a wide range of temperatures (Tann = 300–1400 °C) under atmospheric N2 pressure and under ultra-high N2 pressure conditions to avoid the GaN decomposition. Photoluminescence (PL) studies reveal the YL2 band with a maximum at 2.3 eV before annealing and two new PL bands after annealing at Tann > 600 °C: the OL3 band with a maximum at 2.1 eV and the RL4 band with a maximum at 1.6–1.7 eV. The ammonothermal GaN samples have high concentrations of complexes containing gallium vacancy (VGa), hydrogen, and oxygen. The first-principles calculations suggest that the VGa-3Hi complex is the origin of the YL2 band, while the VGa-3ON complex is responsible for the RL4 band.

GaN samples were implanted with Be and annealed in different conditions in order to activate the shallow BeGa acceptor. Low-temperature photoluminescence spectra were studied to find BeGa-related defects in the implanted samples. A yellow band with a maximum at about 2.2 eV (the YLBe band) was observed in nearly all samples protected with an AlN cap during the annealing and in samples annealed under ultrahigh N2 pressure. A green band with a maximum at 2.35 eV (the GL2 band), attributed to the nitrogen vacancy, was the dominant defect-related luminescence band in GaN samples annealed without a protective AlN layer. The ultraviolet luminescence (UVLBe) band with a maximum at 3.38 eV attributed to the shallow BeGa acceptor with the ionization energy of 0.113 eV appeared in implanted samples only after annealing at high temperatures and ultrahigh N2 pressure. This is the first observation of the UVLBe band in Be-implanted GaN, indicating successful activation of the BeGa acceptor.

No abstract