A planar catalytic combustion gas sensor based on Pd/Pt catalyst supported on F-doped SnO 2 nano-crystalline materials has been designed and fabricated for hydrogen detection. The sensor consists of platinum heaters on an alumina plate coated with a catalytic layer and compensating layer. This sensor exhibited better performance than that of the sensors employing sensing material of Pd/Pt catalyst on -Al 2 O 3 and of Pd/Pt catalyst on nano-crystalline SnO 2 . The detection limit of the sensor at 370 o C is in the concentration range of 0.5-5% (v/v), with an excellent linearity of signal voltage to the hydrogen gas concentration.

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